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Bonding with adhesives is an important technique for building up hybrid microsystems.Some adhesives are tested with capillary dispensing system for microassembly,and volume of droplets less than 10 nl with good repeatability can be acquired.1-part UV curing adhesive hardens rapidly and is suitable for bonding of transparent microparts.Light-activated adhesive starts the curing process in an adjustable short period of time after the radiation of visible light,and thus suits bonding of non-transparent microparts.A method is proposed for bonding the guides of a miniature linear motor being developed by collaborate research center 516 (SFB516) in Germany.With the method high assembly accuracy in the vertical direction can be guaranteed.By making small grooves on the stator for containing adhesive,the deterioration of the accuracy due to the thickness of adhesive layer can be avoided.The criteria on deciding the size of the groove are given and analyzed.Vision based inspection method is introduced for automatic assembly of the guides.The dispensing volume and position of dispensed adhesive droplets can be detected for ensuring the bonding quality.