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真空喷涂仪在电镜维护中是必不可少的设备,同时还用于扫描电镜制样。其能否正常工作直接影响电镜的维护及电镜制样。现将真空喷涂仪故障排除总结如下。1 故障现象1.1 正常工作状态时,开启机械泵(RP),关闭扩散泵(DP),真空表的指示应在低真空范围(1×10-3～5×10-4E),故障时真
Vacuum sprayer is an indispensable device in the maintenance of electron microscopes, and it is also used in scanning electron microscopes for sample preparation. Whether it can work normally affects the maintenance of the electron microscope and the preparation of the electron microscope. Vacuum sprayer troubleshooting is summarized below. 1 Failure phenomenon 1.1 In the normal working state, open the mechanical pump (RP), close the diffusion pump (DP), the indication of the vacuum gauge should be in the low vacuum range (1×10-3～5×10-4E).