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讨论了激光陀螺超光滑光学反射镜基片的加工和检测技术,并给出了超光滑光学基片的非接触光学测量仪和原子力显微镜的测试图。还论述了原子力显微镜测试的准确性以及超光滑光学表面的分形特征。
The processing and testing technology of the laser gyro ultra-smooth optical mirror substrate is discussed. The test chart of the non-contact optical measuring instrument and atomic force microscope of the ultra-smooth optical substrate is given. It also discusses the accuracy of atomic force microscopy testing and the fractal features of ultra-smooth optical surfaces.