硅基波导慢光器件是构建全光智能互连和实时高速测控等下一代信息技术的关键器件,在光通信和光信息处理等诸多领域具有显著的技术优势和巨大的应用潜力.随着器件结构的不断创新以及微电子制造技术的不断升级换代,硅基波导慢光器件愈来愈走向实用化.文章介绍了慢光的基本原理,概述了当前国内外硅基波导慢光器件的研究进展,着重分析了基于微环谐振腔的硅基波导慢光器件,并指出了它在具体应用领域中的发展前景. Si-based waveguide slow optical devices are the key devices for constructing all-optical intelligent interconnection and real-time high-speed measurement and control and other next-generation information technologies and have significant technical advantages and great potential in many fields such as optical communications and optical information processing. As the structure of devices And the continuous upgrading of microelectronic manufacturing technology, the silicon-based waveguide slow optical devices are becoming more and more practical.This paper introduces the basic principles of slow light, summarizes the research progress of the slow optical devices based on silicon waveguide at home and abroad, The emphasis is put on the analysis of the slow waveguide optical waveguide device based on the microring resonator, and its development prospect in the specific application is pointed out.