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探讨低温下的ITO薄膜方块电阻值随温度的变化关系,为军用特种显示器在极端低温环境下的加热功耗设计提供理论依据。通过测量ITO薄膜加热器电极电阻值随温度的变化量,研究温度(低温)对ITO薄膜导电性能的影响。实验结果表明:ITO薄膜的导电性能在低温下随着温度的降低而提高;低温下的ITO薄膜方块电阻值与温度之间呈一元二次函数关系变化;ITO薄膜的膜层越厚,低温下其方块电阻值降低越明显,导电性越高;当环境温度由常温(25℃)降至-50℃时,几种不同膜厚的ITO薄膜方块电阻值分别平均降低5.55%、5.01%和2.77%,对应的功耗平均增加5.88%、5.28%和2.85%。该试验结果为军用特种显示器在极端低温环境下的加热功耗设计提供了理论依据。
The relationship between the resistance value of ITO thin film and the temperature at low temperature is discussed, which provides the theoretical basis for the design of heating power consumption of military special display in extreme low temperature environment. The influence of temperature (low temperature) on the conductivity of ITO thin film was investigated by measuring the change of electrode resistance with the temperature of ITO thin film heater. The experimental results show that the electrical conductivity of ITO thin films increases with the decrease of temperature at low temperature. The sheet resistance of ITO thin films shows a quadratic linear relationship with temperature at low temperature. The thicker film of ITO thin films, The sheet resistance of the ITO film decreases by 5.55%, 5.01% and 2.77, respectively, when the ambient temperature decreases from room temperature (25 ℃) to -50 ℃. %, The corresponding power consumption increased by 5.88%, 5.28% and 2.85% on average. The test results provide a theoretical basis for the design of heating power consumption of military special displays in extreme low temperature environment.