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为满足日盲探测系统的技术要求,研制了一种可以实现紫外日盲区(200~270nm)高透射、近紫外到近红外区(300~1200nm)深截止的光学滤光片。通过分析材料的光学特性,结合光学薄膜理论,优化膜系结构,设计了介质与金属组合的膜系。采用电子束加热蒸发的方法沉积金属膜,通过对沉积速率的实验研究,在保证金属光学性能的前提下,有效降低了膜厚控制误差。采用逆向反演法与膜层敏感度分析,对谐振层工艺参数进行优化,有效降低了谐振层的控制误差。该滤光膜在200~270nm波段的平均透射率达到51.21%,在300~1200nm抑制区的平均透射率为0.90%。
In order to meet the technical requirements of the blind detection system, an optical filter that can achieve high transmittance in the UV-blind zone (200 ~ 270nm) and deep cutoff in the near UV to near infrared (300 ~ 1200nm) has been developed. By analyzing the optical properties of materials and combining with the theory of optical thin film, the film structure is optimized and the film system of medium and metal combination is designed. By electron beam heating evaporation deposition of metal film, through the experimental study of deposition rate, to ensure the optical properties of the premise, effectively reduce the film thickness control error. The reverse inversion method and sensitivity analysis of the film were used to optimize the process parameters of the resonant layer, which effectively reduced the control error of the resonant layer. The average transmittance of the filter in the wavelength band of 200 to 270 nm reaches 51.21%, and the average transmittance in the region of 300 to 1200 nm is 0.90%.