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实验测量了波长1064nm,10kHz高重复频率激光辐照下镀制Ta2O5/SiO2多层膜的K9、石英玻璃、白宝石高反膜元件温升变化。有限元分析的结果与实验结果相一致。用ANSYS程序计算了不同基板、空气对流系数及基板尺寸对激光辐照中心点温度的影响。结果表明:白宝石基片的薄膜元件激光辐照点的温度最低,其次是石英,K9玻璃基片的薄膜元件激光辐照点温度最高。空气对流系数在大光斑或长时间辐照时对激光辐照点温度影响较大,在小光斑或短时间辐照时对激光辐照点温度影响甚微,可忽略不计。基板越厚,基板直径越大,激光辐照中心点温度越低,基板直径比厚度更能影响激光辐照中心点温度变化。
The temperature change of K9, quartz glass and white high reflective film element coated with Ta2O5 / SiO2 multilayers under the laser of 1064nm and 10kHz high repetition rate was measured experimentally. The results of finite element analysis are consistent with the experimental results. ANSYS program was used to calculate the different substrate, air convection coefficient and substrate size of the laser irradiation center temperature. The results show that the temperature of the laser irradiation point of the thin film element of the white sapphire substrate is the lowest, followed by quartz, and the temperature of the laser irradiation point of the thin film element of the K9 glass substrate is the highest. Air convection coefficient in large spot or long-term exposure to laser irradiation point temperature greater impact, in the small spot or short-term exposure to laser irradiation temperature has little effect, can be ignored. The thicker the substrate, the larger the substrate diameter, the lower the laser irradiation center temperature, the substrate diameter more than the thickness of the laser irradiation center temperature changes.