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介绍了采用光刻离子交换工艺制作平面交叉型微透镜阵列的方法。利用积分形式的光线方程式讨论了平面交叉型微透镜的近轴光学特性,研究了微透镜的光线轨迹方程式和一些重要的近轴成像特性,利用ABCD定理得到了平面交叉型微透镜像距、焦距、像高、横向放大率和主平面位置的数学表达式,焦距的理论计算结果和实验数据吻合得很好。
The method of making planar cross-type microlens array by photolithography ion exchange process is introduced. The paraxial optical properties of planar cross-shaped microlenses are discussed using the light equation of integral form. The light path equations of microlenses and some important paraxial imaging characteristics are studied. The image distance of cross-shaped microlenses and the focal length , Such as the height, horizontal magnification and the main plane position of the mathematical expression, the theoretical calculation of focal length and experimental data in good agreement.