硅片的标准化工作开始较早.早在1973年,美国半导体工业方面的一些组织和公司,就已致力于建立硅片的工业标准,1977年美国材料试验协会也颁布了“硅单晶抛光片的标准规范”.并在1980年和1981年进行了两次修订,最后一次修订稿直到1984年仍未变动.总之,硅圆片早已形成了世界范围的工业标准.不过,这些标准巨离VLSI(特别是ULSI)的要求尚很远. As early as 1973, some organizations and companies in the semiconductor industry in the United States had devoted themselves to establishing industrial standards for silicon wafers. In 1977, the American Society for Testing Materials promulgated the “silicon single crystal polishing sheet Standard specifications. ”And in 1980 and 1981 were revised twice, the last revision of the draft remained unchanged until 1984. In short, silicon wafers have long formed a worldwide industry standard.However, these standards giant VLSI (Especially ULSI) is still far from the requirements.