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脉冲激光电化学复合沉积利用激光的热力冲击效应可以有效提高沉积效率,改善加工质量。在所构建的纳秒脉冲激光电化学沉积加工系统中,利用激光辐照和电化学沉积的方法对铜进行了复合沉积试验。分析了激光的热力冲击效应对电沉积的作用机理,激光产生的力效应使阴极基片发生弹性变形,改变了电极电势和电流密度,提高了电沉积质量。通过加工试验,研究了激光平均功率密度对沉积质量和沉积效率的影响,并进行了讨论。试验结果表明,激光平均功率密度介于100~400 k W/cm2时可以获得较好的沉积层质量。激光平均功率密度在200 k W/cm2左右,沉积速率取得最大值。
Pulsed laser electrochemical deposition using laser thermal shock effect can effectively improve the deposition efficiency and improve the processing quality. In the constructed nanosecond pulsed laser electrochemical deposition processing system, the composite deposition experiment of copper was carried out by laser irradiation and electrochemical deposition. The mechanism of thermal shock effect on electrodeposition was analyzed. The force effect of laser produced elastic deformation of the cathode substrate, which changed the electrode potential and current density and improved the quality of electrodeposition. The effects of laser average power density on deposition quality and deposition efficiency were studied and discussed through machining experiments. The experimental results show that better laser deposition quality can be obtained when the laser average power density is between 100 and 400 k W / cm2. The average laser power density is around 200 k W / cm2, and the deposition rate is maximized.