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以TiCl4为前躯体,两亲性三嵌段共聚物F38为模板剂,Si(100)为衬底,采用溶胶-凝胶法和旋涂涂膜工艺,制备了孔径可调的纳米多孔TiO2薄膜.研究了聚合物模板浓度与TiO2薄膜的纳米孔形态的关系.随着模板剂含量的增加,薄膜中介孔密度随之增加,约大于15%便发生介孔连通,连通后介孔成蠕虫状.同时,研究了不同的退火温度及退火方式对纳米TiO2薄膜晶相的影响.单次退火4h(600～800℃)为锐钛矿相、热稳定性好,而等时退火容易生成锐钛矿相/金红石相的混晶.
The porous TiO2 films with adjustable pore size were prepared by using TiCl4 as the precursor and amphiphilic triblock copolymer F38 as the template and Si (100) as the substrate. The porous films were prepared by sol-gel method and spin- The relationship between the concentration of template and the nanopore morphology of TiO2 thin films was studied.The mesopore density increased with the increase of template content, and the mesopores became larger when the content of template was above 15% At the same time, the effects of different annealing temperature and annealing method on the crystalline phase of nano-TiO2 film were studied.A single anneal for 4h (600 ~ 800 ℃) is anatase phase with good thermal stability, while the isochronal annealing is easy to produce anatase Mixed phase of the mineral / rutile phase.