利用自主合成的非线性有机-无机复合材料作为包层,紫外光敏型SU-8负胶为芯层,通过直接光写入技术成功研制了双有源包层结构聚合物41×41信道阵列波导光栅(AWG)器件。器件在设计中采用正矩形的波导结构。经计算,当包层厚度为5μm,芯径尺寸为4mm×4μm时,可实现单模传输。器件波长间隔定为0.8nm,中心波长为1550nm。经测试,该器件传输损耗为1.2dB/cm,中心信道衍射损耗为6.2dB,实测波长间隔为0.793nm,器件的温度漂移量为-0.08nm/℃。 Using the self-synthesized nonlinear organic-inorganic composite as the cladding and the UV-sensitive SU-8 as the core, the double active clad polymer 41 × 41 channel array waveguide Grating (AWG) device. The device is designed with a positive rectangular waveguide structure. Calculated, when the cladding thickness of 5μm, the core size of 4mm × 4μm, can achieve single-mode transmission. The device wavelength interval is set at 0.8nm, the center wavelength is 1550nm. Tested, the device transmission loss of 1.2dB / cm, the center channel diffraction loss of 6.2dB, the measured wavelength interval of 0.793nm, the device temperature drift of -0.08nm / ℃.