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只采用一般设计规则所规定的局部图形的特点就能检查光刻掩模版上的多种缺陷。在相邻的芯片图象或外部数据库之间不需要进行比较,不要求度量衡学的高精确性。在包含各种类型缺陷的模拟图象上试验了一些检查准则,例如局部偏离直线性或可采纳的周线角。发现了一些适用的算法,用这些算法,可用高速电路以TV速率显示数据。
Only a number of defects on the reticle can be inspected using the features of the local graphic as specified in the general design rules. There is no need to compare between adjacent chip images or external databases and does not require the high accuracy of metrology. Some test criteria were tested on simulated images containing various types of defects, such as local deviations from straightness or admissible circumferential angles. Some suitable algorithms have been found. With these algorithms, high speed circuits can be used to display the data at the TV rate.