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本文重点叙述时分制N倍频技术在磁控溅射中频电源中的应用,文中讨论了以往中频电源技术发展中的短板与瓶颈,今后采用IGBT时分制N倍频技术可以大幅度提高电源的工作频率、输出功率以及整机的可靠性,不失为一前瞻性技术。本文推出的主电路拓扑及其控制系统可做研发时的基础电路以供读者参考。最后制出一款样机,旨在验证其原理的可行性,其技术性能已达到原设计要求。
This article focuses on the application of time-division N multiplier technology in magnetron sputtering mid-frequency power supply. In this paper, we discuss the short board and bottleneck in the development of mid-frequency power supply technology in the past. In the future, IGBT time division N frequency multiplication technology can greatly improve the power supply Working frequency, output power and machine reliability, after all, a forward-looking technology. This article introduces the main circuit topology and its control system can do the research and development of the basic circuit for readers reference. Finally, a prototype was made to verify the feasibility of its principle, its technical performance has reached the original design requirements.