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文中阐述了Y型钛扩散LiNbO_3波导内全反射开关调制器的工作原理,推导出半波电压的计算公式。在Z切LiNbO_3衬底上研制成功实验器件,测得半波电压为13.5v,和计算值十分接近,消光比为80.6%,推算出3db带宽为2.12GHz。并在0.6328μm的光波长下,加1.5KHz、9KHz的方波和0.3MHz、3MHz的正弦波进行了调制实验。
In this paper, the working principle of Y-type titanium diffused LiNbO 3 waveguide internal total reflection switch modulator is expounded, and the formula of half-wave voltage is deduced. A successful experimental device was fabricated on a Z-cut LiNbO_3 substrate. The measured half-wave voltage was 13.5v, which was very close to the calculated value. The extinction ratio was 80.6%, and the 3db bandwidth was calculated to be 2.12GHz. And the modulation experiment was carried out under the light wavelength of 0.6328μm with 1.5KHz, 9KHz square wave and 0.3MHz, 3MHz sine wave.