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本文重点讨论了用不同的工艺方法来制备薄膜磁头中的关键元件-磁轭。采用多次光刻的方法克服湿法工艺中磁性膜NiFe层的侧向钻蚀问题，从而实现对磁轭几何尺寸的精确控制，并对几种工艺方法的优缺点作了比较详细的分析。
This article focuses on the use of different processes for the preparation of thin film magnetic head key components - yoke. The method of multiple lithography is used to overcome the lateral erosion of the NiFe layer of the magnetic film in the wet process so that the precise control of the geometrical dimensions of the yoke can be achieved. The advantages and disadvantages of several process methods are analyzed in detail.