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应用环形压电板振子的超声马达具有厚度小的优点,能满足很多工程上的要求。其工作原理和其他类型的超声马达一样,也是通过摩擦力把振子表面质点的椭圆运动变换为转子的运动。因此,为要开发出性能优良的超声马达,必须清楚了解作为超声马达定子的环形板的振动特征。过去对环形板或圆盘的分析均仅考虑自由振动的情形,本文则分析了在环的内缘或外缘夹紧的情况下,环形压电板的非轴对称振动。内容包括振动时的位移分布图样,自由边缘上质点的椭圆运动,表面上感应电荷的分布及机电耦合因数等。还进行了数字计算,并从应用于超声马达的角度出发,对几种不同的振动模式作了评估。
Ultrasonic motors using ring-shaped piezoelectric vibrators have the advantage of being small in thickness and can satisfy many engineering requirements. Its working principle and other types of ultrasonic motors, but also through the friction surface of the oscillator particle elliptic motion into the rotor. Therefore, in order to develop an ultra-high-performance ultrasonic motor, it is necessary to clearly understand the vibration characteristics of an annular plate as an ultrasonic motor stator. In the past, the analysis of the annular plate or disk only considered the case of free vibration. In this paper, the non-axisymmetric vibration of the annular piezoelectric plate was analyzed when the inner or outer ring was clamped. The content includes the displacement distribution pattern during vibration, the elliptical motion of the particle on the free edge, the distribution of induced charges on the surface and the electromechanical coupling factor. Numerical calculations were also made and several different modes of vibration were evaluated from the point of view of application to ultrasonic motors.