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IC制造商在提高盈利水平、缩短产品周期的同时,面临着不断增加的制造复杂性和成品率的压力。如何在重要工艺步骤之后的生产线中集成缺陷检测和管理的功能?如何在更严苛的设计规则下分类缺陷?这些都是困扰Fab的难题。KLA-Tencor中国技术总监任建宇表示,“在良率管理与工艺控制方面,KLA-Tencor致力于提供最优的成品率解决方案。”
IC manufacturers are faced with the pressure of increasing manufacturing complexity and yield while increasing their profitability and shortening their product lifecycle. How to integrate defect detection and management capabilities in production lines after important process steps? How to classify defects under more stringent design rules? These are puzzles that plague Fab. “The KLA-Tencor is committed to providing the best yield solution for yield management and process control.” "