通过喷淋蚀刻实验研究了模具钢微细蚀刻加工时,工件掩膜间隙、蚀刻液喷淋压力和加工时间对蚀刻深度的影响。蚀刻深度随掩膜间隙的蚀刻尺寸、加工时间的增加而增大,随蚀刻液喷淋压力的增大呈先增大后减小趋势。这归因于掩膜间隙和蚀刻液喷淋压力的增大加快了蚀刻液的更新,使蚀刻反应充分并有利于反应杂质的排除。但是过大的喷淋压力减小了蚀刻液驻留时间,阻碍了蚀刻深度的增加。 The effect of mask clearance, spray pressure of spray solution and processing time on the etching depth was studied by means of spray etching experiment. The etching depth increases with the etching size of the mask gap and the processing time, and increases with the increase of the spraying pressure of the etching solution, and then increases first and then decreases. This is attributed to the increase of the mask gap and the spray pressure of the etchant, which accelerates the etching liquid renewal and makes the etching reaction sufficiently and facilitates the elimination of the reaction impurities. However, excessive spray pressure reduces the etchant residence time, hindering the increase in etch depth.