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基于PZT压电陶瓷驱动器的非球面能动抛光盘,能够在PZT驱动器的作用下改变面形,用于中小口径非球面镜加工。为优化设计基于PZT压电陶瓷驱动器的非球面能动抛光盘,利用有限元分析方法,计算各驱动器的影响函数,计算非球面能动抛光盘的输出面形,与理论面形比较得到剩余残差。以优化设计驱动器排布方式和极头直径为例,当非球面能动抛光盘中心到非球面工件中心的距离L为120mm,分别计算比较,极头直径为Φ10mm时,19单元PZT圆形排布与21单元PZT方形排布的剩余残差;以及19单元PZT圆形排布时,极头直径为Φ10mm与Φ14mm的剩余残差。结果表明,非球面能动抛光盘产生变形后的剩余残差RMS相应分别为0.303μm、0.367μm、0.328μm。因此,基于PZT压电陶瓷驱动器的非球面能动抛光盘确定选用19单元PZT圆形排布且极头直径Φ10mm。
PZT piezoelectric ceramic actuator based on the aspherical surface active polishing disc, PZT driver can change the surface shape, for small and medium-diameter aspheric mirror processing. In order to optimize the design of aspheric surface active polishing disc based on PZT piezoelectric ceramic actuator, the influence function of each actuator is calculated by finite element analysis method. The output surface shape of aspherical active polishing disc is calculated and the residual residual is obtained by comparison with the theoretical surface shape. Taking the optimized arrangement of driver arrangement and the diameter of the pole as an example, when the distance L between the center of the aspherical active polishing disc and the center of the aspherical workpiece is 120mm, respectively, when calculating and comparing the pole diameters of Φ10mm, 19 units PZT circular arrangement And 21 units of PZT square residual residuals; and 19 units PZT circular arrangement, the polar head diameter of Φ10mm and Φ14mm residual residuals. The results show that the RMS residual residual RMS of the aspherical active disc is 0.303μm, 0.367μm and 0.328μm respectively. Therefore, based on the PZT piezoelectric ceramic actuator aspheric surface active polishing disc to determine the selection of 19 units PZT circular arrangement and the pole diameter Φ10mm.