衍射谱位相恢复——一种测量波像差的新方法

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1.通常用干涉方法测量光学系统的波像差,但由于干涉法需要参考波面,因而在实际应用中有一定限制.Sarnik提出了一种通过恢复点扩散函数(PSF)的位相半反演空间望远镜波像差的方法.但由于在像点附近能量高度集中,探测器易于饱和;并且对高分辨率光学系统(例如高倍显微物镜),常规探测器的分辨率不易满足需要.本文提出一种简单的用衍射谱分析光学系统波像差的方法,可以避免干涉法的一些缺点.并且由 1. The interferometric method is usually used to measure the wavefront aberration of an optical system, but due to the interferometer’s need of a reference wavefront, there is some limitation in practical application.Sarnik proposed a phase semi-inversion space through the recovery point spread function (PSF) Telescope wave aberration method.But due to the high concentration of energy in the vicinity of the image point, the detector is easy to saturate; and for high resolution optical system (such as high magnification microscope objective), the resolution of conventional detectors can not easily meet the need.This paper proposes a A simple method of using the diffraction spectrum to analyze optical system wave aberration can avoid some of the shortcomings of the interferometry.
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