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Microstructure and phase transformation behaviors of the film annealed at different tempera- tures were studied by X-ray diffractometry (XRD), transmission electron microscopy and differ- ential scanning calorimeter (DSC). Also tensile tests were examined. For increasing annealed temperature, multiple phase transformations, transformations via a B19-phase or direct marten- site/austenite transformtion are observed. The TiNiPd thin film annealed at 750°C had relatively uniform martensite/austenite transformtion and shape memory effect. Martensite/austenite trans- formtion was also found in strain-temperature curves. Subsequent annealing at 450°C had minor effect on transformation temperatures of Ti-Ni-Pd thin films but resulted in more uniform trans- formation and improved shape memory effect.
Microstructure and phase transformation behaviors of the film annealed at different temperaures were studied by X-ray diffractometry (XRD), transmission electron microscopy and differ- ential scanning calorimeter (DSC). Also increasing tests were examined. phase transformations, transformations via a B19-phase or direct marten- site / austenite transformtion are observed. The TiNiPd thin film annealed at 750 ° C had relatively uniform martensite / austenite transformtion and shape memory effect. Martensite / austenite trans- formtion was also found in strain-temperature curves. Subsequent annealing at 450 ° C had minor effect on transformation temperatures of Ti-Ni-Pd thin films but resulted in more uniform trans- formation and improved shape memory effect.