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为了研究射频板条CO2激光器射频频率波动对输出光束的影响,采用等效电路分析和实验测量的方法研究了射频频率对激光器输入输出特性的影响。计算得到射频频率变化2MHz时引起的阻抗实部变化率为0.01%,说明射频频率漂移对放电部分等效电路参量影响很小。射频频率采用79.4MHz,80.0MHz,80.7MHz,81.4MHz,82.0MHz和82.7MHz,以设计频率81.4MHz对应的输出功率为基准,占空比设置为80%时,频率漂移1MHz则激光功率下降约150W。激光功率随频率变化趋势与理论结果一致。结果表明,射频频率变化引起的阻抗匹配问题是导致输出功率波动的主要原因,可以通过改进匹配网络来克服射频频率的波动对激光器性能的影响。
In order to study the influence of RF frequency fluctuation of RF slab CO2 laser on output beam, the influence of RF frequency on the input and output characteristics of laser was studied by means of equivalent circuit analysis and experimental measurement. The calculated real part rate of change of impedance caused by 2MHz change of RF frequency is 0.01%, which shows that the influence of RF frequency drift on discharge part equivalent circuit parameters is very small. RF frequency using 79.4MHz, 80.0MHz, 80.7MHz, 81.4MHz, 82.0MHz and 82.7MHz, the design frequency of 81.4MHz corresponding to the output power as a benchmark, the duty cycle is set to 80%, the frequency drift of 1MHz then the laser power down about 150W. The trend of laser power with frequency is consistent with the theoretical result. The results show that the impedance matching caused by the variation of RF frequency is the main reason leading to the output power fluctuation. The influence of the fluctuation of RF frequency on the performance of the laser can be overcome by improving the matching network.