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根据纳米压入法测量与评定MEMS材料力学性能的原理 ,对诸如测量仪器、压头、评定模型、测试条件等影响力学性能测量精确度、测量结果的可比性的主要因素进行了分析。在此基础上 ,提出对MEMS材料力学性能测量与评定进行标准化的初步设想
According to the principle of nanoindentation method to measure and evaluate the mechanical properties of MEMS materials, the main factors influencing the measurement accuracy, the comparability of measurement results such as measuring instruments, indenters, evaluation models and test conditions are analyzed. Based on this, a preliminary tentative plan for standardizing the measurement and evaluation of mechanical properties of MEMS materials