微区域X光光谱仪,又名电子探针X射线显微分析仪(Electron probe x-ray microanalyzer),是近十年来才发展起来的一种高级精密仪器(图1)。此仪器能分析大多数的固体试样,特别对研究金属、矿物、陶瓷及半导体等更为有效。可分析元素范围为12镁～92铀,分析灵敏度 Micro-area X-ray spectrometer, also known as Electron probe x-ray microanalyzer, is an advanced precision instrument developed in the last ten years (Figure 1). The instrument can analyze most of the solid samples, especially for the study of metals, minerals, ceramics and semiconductors more effective. Analytical elements range from 12 to 92 uranium, analytical sensitivity