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为实现大口径光学元件表面疵病的高效率、高精准的检测,本文提出一种能分辨微米级疵病的光学显微散射扫描成像检测系统,因为该检测系统单个子孔径的物方视场为毫米级,所以检测大口径光学元件需对X、Y方向进行子孔径扫描成像并将子孔径图拼接成同一坐标系下的全孔径图。在进行扫描时,系统的机构误差会被引入到子孔径列阵中,导致子孔径拼接处产生像素错位,甚至造成拼接断裂的情况,从而严重影响疵病等级及位置的正确评定。鉴于此,本文对影响全孔径拼接最敏感的误差因素进行了分析,并根据其特点找到合理减小误差的方法,确保子孔径的正确拼接。
In order to realize the high-efficiency and high-precision detection of surface defects of large-diameter optical components, an optical microscopic scattering scanning imaging detection system capable of resolving micron-scale defects is proposed in this paper because the object-side field of view of a single sub-aperture of the detection system Is a millimeter, so the detection of large-aperture optical elements requires sub-aperture scanning imaging in the X and Y directions and splicing the sub-aperture maps into a full aperture map in the same coordinate system. During the scanning, the systematic errors of the system will be introduced into the sub-aperture array, leading to pixel dislocation in the sub-aperture splicing and even splitting and fracture, thus seriously affecting the correct evaluation of the defect grade and position. In view of this, this paper analyzes the most sensitive error factors affecting the full aperture stitching, and according to its characteristics to find a reasonable way to reduce the error, to ensure the correct stitching subaperture.