【摘 要】
：
提出了一种基于平滑冲击驱动原理的精密定位直线微工作台.通过采用微小强磁铁作为摩擦元件,减小了由摩擦元件磨损而产生的摩擦力的变化,从而提高了微工作台的稳定性.设计制作
【机 构】
：
日本东北大学纳米机械系纳米测量与控制实验室,日本NEC/TOKIN株式会社
论文部分内容阅读
提出了一种基于平滑冲击驱动原理的精密定位直线微工作台.通过采用微小强磁铁作为摩擦元件,减小了由摩擦元件磨损而产生的摩擦力的变化,从而提高了微工作台的稳定性.设计制作了微工作台样机,并对精密定位工作台的动态特性和静态特性进行了实验研究.结果表明,微工作台体积小(20mm×10 mm×3 mm),可实现6 nm的精确定位,最高驱动速度可达5.4 mm/s,最大行程可达20 mm.
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