论文部分内容阅读
用高功率的Ｎｄ３＋：ＹＡＧ脉冲激光轰击真空室内的石墨靶，形成激光等离子体雾状物质，在硅衬底上沉积形成类金刚石薄膜．用椭圆偏振光谱法测量不同衬底温度下制备的系列样品的厚度和折射率，发现随着衬底温度的升高，薄膜的厚度减小而折射率增大，这种可以控制折射率变化的薄膜，可能为光学增透增反膜的制备提供一种新方法．
High-power Nd3 +: YAG pulsed laser bombardment of the graphite target in a vacuum chamber to form a laser plasma mist-like substance deposited on a silicon substrate to form a diamond-like carbon film. The thickness and refractive index of the series of samples prepared at different substrate temperatures were measured by ellipsometry. It was found that with the increase of the substrate temperature, the thickness of the film decreased and the refractive index increased. This could control the refractive index change Film, may provide a new method for the preparation of optical antireflection enhancement film.