Emission spectra of XeI* excimers and ultraviolet intensity at 253 nm from a dielectric barrier discharge (DBD)lamp excited by a pulsed voltage were measured as functions of pressure, electrical power, and frequency. In the DBD lamp driven by a higher frequency voltage, a more intense emission of XeI* excimers with high efficiency at 253 nm was found. A diffuse discharge mode was observed at high xenon pressure (＞ 1 atm) with an excessive iodine concentration in the DBD driven by a high frequency (60 kHz) voltage.