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本文介绍新研制的空冷型涡轮分子泵系列。性能测试和现场试验与过去的水冷型相比，在抽速、压缩比、极限真空、剩余气体、振动、噪声等方面都得到了等于或超过以前的结果。新型空冷涡轮分子泵的特点是： （１）不需水冷，所以安装和操作简单，而且可靠。 （２）润滑油的寿命长，超过一年。 （３）与溅射离子泵和冷凝泵等其他超高真空泵相比，运转和维护费用最低。 该新系列的研制是把日本岛津多年经验的飞机用高速转动机器和各种真空机器的设计、制造技术为基础而实现的。同时还研制了具有不同特点的控制回路和保护回路的泵用高频电源。因为涡轮分子泵既适用于无油反复抽降，也适用于长时间超高真空抽气，所以可望广泛应用．目前研制的空冷涡轮分子泵有抽速 ２２０升／秒、４５０升／秒和１４５０升／秒三种规格。
This article describes the newly developed air-cooled turbomolecular pump series. Performance tests and field tests equal or exceed previous results in pumping speed, compression ratio, ultimate vacuum, residual gas, vibration, noise, etc. compared to the previous water-cooled version. The new air-cooled turbo molecular pump features: (1) no water, so easy to install and operate, and reliable. (2) Lube life is longer than one year. (3) The lowest operating and maintenance costs compared to other ultra-high vacuum pumps such as sputter ion pumps and condensate pumps. The development of this new series is based on the design and manufacturing technology of high-speed rotating machines and vacuum machines of many years of experience in Shimadzu. At the same time also developed with different characteristics of the control circuit and the protection circuit of high-frequency pump power. Turbomolecular pump is not only suitable for repeated pumping without oil, but also for a long time ultra-high vacuum pumping, it is expected to be widely used. Currently developed air-cooled turbopump pumping speed of 220 liters / sec, 450 liters / sec and 1450 liters / sec three specifications.