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采用真空磁控溅射沉积SS-AlN金属陶瓷太阳选择性吸收涂层。涂层光学功能层的制备,先采用铜靶溅射Cu红外反射层;再采用不锈钢(SS)和铝两金属靶在Ar和N2的混合气体中同时溅射沉积SS-AlN金属陶瓷吸收层;最后采用Al靶在Ar和N2中反应溅射沉积AlN减反射层。金属陶瓷吸收层由高、低SS体积份额的两吸收子层组成。优化溅射镀膜工艺参数获得高性能吸收涂层,太阳吸收比α(AM1.5)高达0.956±0.003(国标GB:α≥0.86),比GB高10%;红外发射比ε仅为0.043±0.003(GB:ε≤0.08)。制备成φ58×2100 mm全玻璃真空太阳集热管,80℃平均热损系数ULT仅为0.47±0.01 W/m2℃(GB:ULT≤0.85 W/m2℃),比GB低0.38 W/m2℃,性能提高45%。制备的真空集热管具有良好的真空品质,集热管内管加热350℃恒温480 h后,吸气镜面轴向长度平均消失率仅为2~3%,集热管真空品质优于GB高达100倍以上(GB:350℃恒温48 h,镜面消失率≤50%)。
SS-AlN cermet solar selective absorption coating was deposited by vacuum magnetron sputtering. In the preparation of the optical functional layer, the Cu infrared reflective layer is first sputtered with a copper target; then the stainless steel (SS) and aluminum two metal targets are used to simultaneously sputter and deposit the SS-AlN cermet absorber layer in the mixed gas of Ar and N2; Finally, the Al target was deposited by reactive sputtering in Ar and N2 with Al target. The cermet absorber consists of two absorber sublayers of high and low SS volume fractions. Optimum sputtering process parameters to obtain high-performance absorption coating, the solar absorption ratio α (AM1.5) up to 0.956 ± 0.003 (GB GB: α ≥ 0.86), 10% higher than GB; infrared emission ratio ε is only 0.043 ± 0.003 (GB: ε ≦ 0.08). The average heat loss coefficient (ULT) of 80 ℃ is only 0.47 ± 0.01 W / m2 ℃ (GB: ULT≤0.85 W / m2 ℃), 0.38 W / m2 ℃ lower than GB, Performance increased by 45%. The prepared vacuum tube had good vacuum quality. After the inner tube of the tube was heated at 350 ℃ for 480 h, the average axial disappearance rate of the suction mirror was only 2 ~ 3%, and the vacuum tube’s quality was 100 times higher than that of GB (GB: constant temperature of 350 ℃ 48 h, mirror disappearance rate ≤ 50%).