用X射线光电子能谱 (XPS)研究新鲜Nd表面在不同氧气和空气进气量的情况下 ,表面氧化物的生长过程 .发现氧化层由氧化物、氢氧化物及表面化学吸附水三种成分 ,这三种成分的增加与进气量都存在正比对数关系 ,氧化物和吸附水在一定进气量后趋于饱和 ,而氢氧化物持续不断增加 ,最终氢氧化物占据主要地位 . X-ray photoelectron spectroscopy (XPS) was used to study the growth process of the surface oxides under different oxygen and air inflow rates. The results showed that the oxide layer consisted of oxides, hydroxides and surface chemisorption water , The increase of these three components is proportional to the amount of air intake logarithm, oxide and adsorbed water in a certain amount of gas into the saturated, while the hydroxide continued to increase, the final hydroxide occupy a dominant position.