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金属网栅和氧化铟锡(ITO)等透明导电膜是实现电磁屏蔽和可视兼容的常用材料,但其屏蔽和可见光透射率受到了很大的限制。通过解决屏蔽、导电与可视性能相互制约的矛盾,可有效提高电磁屏蔽与可视性能的兼容性。为此,报道了一种金属光子晶体透明膜。采用磁控溅射制备了ITO/Ag为周期的金属光子晶体透明膜,研究了周期结构对样品屏蔽效能、透射率和方阻的影响。研究表明,随着单位周期金属膜厚的增加,可见光600~800 nm波段透射率降低10%以上,可见光透射光谱变窄。同时400~600 nm波长范围内透射率并没有随金属膜厚的增加而降低,甚至升高。随着单位周期金属膜厚增加,微波频段的屏蔽效能相应提高,方阻相应降低。实验证实:光子晶体膜的屏蔽效能与光子晶体中总金属膜厚不存在明确的因果关系,而是与“金属-电介质”的纳米周期结构相关。制备了一种屏效高达70dB,方阻低达2.1Ω,透射率大于50%的光子晶体膜。
Transparent conductive films such as metal meshes and indium tin oxide (ITO) are common materials for achieving electromagnetic shielding and visual compatibility, but shielding and visible light transmittance are greatly limited. By solving the conflict between shielding, electrical and visual performance constraints, which can effectively improve the electromagnetic shielding and visual performance compatibility. To this end, reported a transparent metal photonic crystal film. The transparent film of metal photonic crystal with ITO / Ag cycle was prepared by magnetron sputtering. The influence of periodic structure on the shielding efficiency, transmittance and square resistance of the sample was investigated. The results show that with the increase of metal film thickness per unit period, the transmittance of visible light in the 600-800 nm band is reduced by more than 10%, and the visible light transmission spectrum is narrowed. At the same time, the transmittance in the range of 400-600 nm did not decrease or even increase with the increase of metal film thickness. As the metal film thickness per unit cycle increases, the shielding effectiveness of the microwave band increases correspondingly, and the square resistance decreases accordingly. Experiments show that there is no clear causal relationship between the shielding effectiveness of photonic crystal films and the total metal film thickness in photonic crystals, but rather, they are related to the nano-periodic structure of “metal-dielectric ”. A photonic crystal film with a high screen efficiency of 70dB, a square resistance of 2.1Ω and a transmittance of more than 50% was prepared.