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By using Morse potential model,we calculate the temperature dependence of critical resolved shear stress (CRSS) of some single crystals. Dislocation-phonon interaction is considered in this paper. Theoretical calculations fit experimental law well. Investigations show: interatomic force is the physical intrinsic that controls the plastic deformation processing of materials, and thetemperature dependence of CRSS mainly comes from the temperature dependence of dislocationvibration.