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本文介绍了我所研制成功的WY-6直联式无油机械真空泵。文中主要阐述了对该泵各项性能的测试结果与分析,并对增压级的残余气体进行了质谱分析。通过测试得出:该泵作前级时,实际抽速S_(max)=4.5升/秒,极限压强P_o≤60托;作增压级时S_(max)=8升/秒,P_o≤3×10_(-4)托。经700小时累计运行及56小时连续运行,情况良好,性能稳定。目前该泵已在用户的实际工况中使用。
This article describes the successful WY-6 oil-free mechanical vacuum pump that I developed. The paper mainly expounds the test results and analysis of the performance of the pump, and mass spectrometry analysis of the residual gas in the supercharged stage. The test results show that when the pump is in the first stage, the actual pumping speed S max = 4.5 L / s and the ultimate pressure P_o ≤ 60 Torr, S max = 8 L / s and P_o ≤ 3 × 10 _ (- 4) care. After a total of 700 hours of operation and 56 hours of continuous operation, in good condition, stable performance. Currently the pump has been used in the user’s actual working conditions.