无氧铜是超导线材的重要原料及组成部分,超导组元组装前对无氧铜表面质量的要求很高,表面状态要呈现无氧铜粉红色的本色,光亮、均一,无肉眼可见的油、酸痕、水痕等存在,又要严控杂质含量,除去吸附水等,因此研究无氧铜表面洁净化清洗工艺具有重要意义.工艺研究要立足于既能符合表面质量要求,又适应工业规模生产,同时工艺过程稳定.清洗工艺的工艺流程包括前处理化学去油、酸洗、水洗、烘干等主要环节.本文就硝酸配合表面活性剂及缓蚀剂、双氧水配合硝酸酸洗工艺方案进行了试验研究和对比分析,并就清洗工艺中的化学去油、酸洗、水洗、烘干各环节工艺过程控制及整体控制要求进行了试验研究与分析.研究结果表明:⑴化学去油的彻底、洁净,是保证酸洗质量、效率及最终表面质量的必要条件;⑵通过扫描电镜和光电子能谱分析不同酸洗方案后的表面状态,表面状态和元素含量及分布具有同一性;⑶最终表面质量不仅由化学去油及酸洗环节决定,酸洗环节后的水洗及烘干环节也是保证最终表面质量的重要方面;⑷酸洗环节转入水洗环节、水洗环节转入烘干环节的环境控制和时间间隔控制也是保证最终表面质量的重要方面;⑸工艺过程控制中无氧铜表面工况条件及工况条件变化的均一性,有利于最终良好表面质量的形成. Oxygen-free copper superconducting wire is an important raw material and an integral part of the superconducting assembly prior to the assembly of oxygen-free copper surface quality requirements of the surface state to show oxygen-free copper pink color, bright, uniform, no macroscopic Oil, acid marks, water marks, etc., but also strictly control the content of impurities, remove adsorbed water, etc. Therefore, it is of great significance to study the cleaning process of oxygen-free copper surface.Process research should be based on both meet the surface quality requirements, and Which is suitable for industrial scale production and stable in process, and the technological process of the cleaning process includes the main steps of chemical degreasing, pickling, washing and drying etc. In this paper, nitric acid is mixed with surfactant and corrosion inhibitor, hydrogen peroxide combined with nitric acid pickling The experimental research and comparative analysis of the technological scheme were carried out and the experimental research and analysis on the process control and overall control requirements of chemical degreasing, pickling, washing and drying in the cleaning process were carried out.The results show that: (1) Oil thoroughly, clean, is to ensure pickling quality, efficiency and the final surface quality of the necessary conditions; ⑵ by scanning electron microscopy and photoelectron spectroscopy analysis of different pickling program (3) The final surface quality is determined not only by chemical degreasing and pickling, but also by the washing and drying steps after the pickling. (4) The surface quality of the final surface is the same as that of the final surface. Pickling link into the washing process, the water cycle into the drying process of environmental control and time interval control is also an important aspect to ensure the final surface quality; ⑸ process control oxygen-free copper surface conditions and uniform conditions change working conditions Sexual, conducive to the formation of a final good surface quality.