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在惯性约束聚变(ICF)装置中大量使用具有变频特性的水溶性磷酸二氢钾(KDP)类晶体材料。在KDP晶体上镀制薄膜材料成为保护KDP晶体的有效措施。以正硅酸乙酯(TEOS)为原料,采用溶胶-凝胶法和提拉方式制备膜厚λ/4的增透膜,再采用具有高憎水特性、高透射率、低折射率的氟聚合物AF2400在FC-75的可溶解特性,在SiO2增透膜上旋涂AF2400防潮膜。对薄膜的表面形貌、疏水性能、光学性能和抗激光损伤阈值等进行了测试。结果显示,AF2400-SiO2复合光学薄膜表面平整,折射率为1.21,疏水角可以达到110°~120°,抗激光损伤阈值为19.5 J/cm2,是性能优良的疏水光学薄膜,可用于三倍频晶体KDP的保护。
Water-soluble potassium dihydrogen phosphate (KDP) -based crystal materials with frequency conversion characteristics are widely used in inertial confinement fusion (ICF) devices. Plating thin films on KDP crystals is an effective way to protect KDP crystals. Using tetraethoxysilane (TEOS) as raw material, an AR coating with a thickness of λ / 4 was prepared by the sol-gel method and the pulling method, and then fluorine with high hydrophobicity, high transmittance and low refractive index Polymer AF2400 soluble in the FC-75 features, anti-corrosion coating on the SiO2 anti-corrosion coating AF2400 membrane. The surface morphology, hydrophobicity, optical properties and laser damage threshold of the films were tested. The results show that the surface of AF2400-SiO2 composite optical thin film is smooth, the refractive index is 1.21, the hydrophobic angle can reach 110 ° ~ 120 ° and the laser damage threshold is 19.5 J / cm2. It is a hydrophobic optical thin film with excellent performance and can be used in triple frequency Crystal KDP protection.