前言 90年代以来,集成电路遵循着摩尔(Moore)定律高速发展,0.18μm工艺已日趋成熟,0.13μm 12″硅片等更先进技术也将很快进入大生产应用。日益增加的生产设备投资,日益缩短的技术换代周期,使得半导体产业在高资本投入和高人力投入同时也带来了高风险。人们将更多地关注集成电路生产中的合格率问题,以在提供更为可靠产品 INTRODUCTION Since the 90s, ICs have followed the Moore’s Law and the 0.18μm process has matured. More advanced technologies such as 0.13μm 12 "silicon wafers will also soon enter large-scale production applications. Increasing investment in production equipment, The ever-shortening cycle of technological innovation has also brought high risks to the semiconductor industry, both in terms of high capital investment and high manpower investment. People will pay more attention to the issue of pass rates in the production of integrated circuits in order to provide more reliable products