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Effect of the Sputtering Parameters on the Structure and Properties of Cu3N Thin Film Materials
【机 构】
：
School of Electronic Information＆ Electric Engineering, Changzhou Institute of Technology, Changzhou
【出 处】
：
武汉理工大学学报（材料科学版）（英文版）
【发表日期】
：
2010年6期
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