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设计了磁控溅射 多弧镀膜机的微机控制系统 ,采用PLC可编程控制器与上位机进行数据传递和控制设备的控制方式。本微机控制系统中的真空镀膜机 ,设计了 3套孪生磁控、10套多弧和 8级工艺的过程控制 ,具有自动组合工艺和自控程序升级功能 ,从而实现多种工艺的镀膜要求。
Design of the magnetron sputtering multi-arc coating machine microcomputer control system, PLC programmable logic controller and the host computer for data transmission and control equipment control. The vacuum coating machine in the microcomputer control system is designed with three sets of twin magnetic control, 10 multi-arc and eight-stage process control, automatic combination process and automatic control program upgrade function, in order to achieve a variety of coating requirements.