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根据光学玻璃硬度高和脆性大的特点,从理论上分析了超声波研磨加工光学玻璃材料的去除机理,试验表明,超声加工工具振动振幅为0.03~0.1 mm,频率为16~25 kHz条件下,超声波的超精密加工光学玻璃比不加超声振动加工材料去除率高1.5倍左右,表面质量好,粗糙度值降低100%左右。
According to the characteristics of high hardness and brittleness of optical glass, the removal mechanism of optical glass material by ultrasonic grinding was theoretically analyzed. The results show that the ultrasonic vibration amplitude of ultrasonic tool is 0.03 ~ 0.1 mm and the frequency is 16 ~ 25 kHz. Ultra-precision optical glass processing than without ultrasonic vibration material removal rate of 1.5 times higher, the surface quality is good, the roughness value decreased by about 100%.