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法国电子技术仪器实验室发明了无定形硅室温微型辐射热测量仪。它的热绝缘性能良好 ,可以低热时间常数进行红外探测。使用 4 7μm大小的 2 56×6 4像素样机 ,可获得 f/1低于 50 m K的噪声等值信号温度差。微电子技术通常在读出电路衬底上方辐射热仪结构上建立微电桥。薄铝反射
France Electronic Technology Instrument Laboratory invented the amorphous silicon room temperature micro-bolometer. Its thermal insulation is good, infrared detection of low thermal time constants. Using a 2 56 × 6 4 pixel prototype of 47 μm size, a noise equivalent signal temperature difference of f / 1 less than 50 mK can be obtained. Microelectronics usually builds a micro-bridge on the structure of the radiometer above the readout circuit substrate. Thin aluminum reflection