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表面氧污染的钛膜,其吸氢能力比清洁钛膜降低达数倍之多。在厚度d为40nm,表面氧污染的钛膜表面上,重新蒸镀一层极薄的(约1.2nm)清洁钛膜,吸氢、释氢的测量表明其吸氢能力得到恢复。另外,还对其他四块不同厚度的钛膜,在表面清洁及氧污染的条件下,分别进行了吸氢能力实验。实验结果证实:氧污染降低钛膜吸氢能力的原因是使钛膜上氢分子解离的位置减少,而不是扩散阻挡层的作用。
Surface oxygen contamination of the titanium film, its ability to absorb hydrogen than the clean titanium film to reduce the number of times. On the surface of titanium film with thickness d of 40nm and surface oxygen contamination, a very thin (about 1.2nm) clear titanium film was re-deposited. Hydrogen absorption and hydrogen release measurements showed that the hydrogen absorption capacity was restored. In addition, the other four titanium films of different thicknesses were also tested for hydrogen absorption ability under the conditions of surface cleaning and oxygen pollution respectively. The experimental results show that the reason why the oxygen pollution reduces the hydrogen absorption capacity of the titanium film is to reduce the position where the hydrogen molecules on the titanium film are dissociated and not to act as a diffusion barrier.