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提出了基于多光刻胶有效扩散长度的光学临近效应修正模型校准方法,其考虑了一维和二维图形之间光刻胶有效扩散长度的不同.该方法的一个重要步骤在于建立起全新的校准流程,使得一维图形和二维图形具有相同的光学参数和不同的光刻胶有效扩散长度.另外,在该模型校准流程中提出了一种基于可制造性设计理念的交互.从校准结果的关键尺寸误差及仿真轮廓和扫描电子显微镜图像的对比来看,基于多光刻胶有效扩散长度的光学临近效应修正模型校准方法的输出模型更加精确和稳定.
A calibration method of optical proximity effect correction model based on effective diffusion length of multiple photoresists is proposed, which takes into account the difference of effective diffusion length of photoresist between one-dimensional and two-dimensional graphics. An important step of this method is to establish a completely new calibration Process, so that the one-dimensional graphics and two-dimensional graphics with the same optical parameters and different effective diffusion length of the photoresist.In addition, in the model calibration process based on the concept of a manufacturability of the design of interaction from the calibration results The key dimensional errors and the comparison between the simulated contour and the scanning electron microscope image show that the output model of the optical proximity correction model calibration method based on the effective diffusion length of multiple photoresists is more accurate and stable.