论文部分内容阅读
设计与研制了一种小型的用于制备薄膜样品电接触的烧结炉装置.该装置简单、实用,特别适用于半导体霍尔样品电极的烧结.
A compact sintering furnace for the electrical contact of thin film samples was designed and developed. The device is simple and practical, especially suitable for semiconductor Hall sample electrode sintering.