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介绍宽束射频离子源原理及结构,分析射频匹配网络中调谐和负载电容与输入频率、离子源电阻、传输线特征阻抗、支路电感的关系,导出了射频离子源阻抗公式。
This paper introduces the principle and structure of wide beam radio frequency ion source, analyzes the relationship between tuning and load capacitance, input frequency, ion source resistance, transmission line characteristic impedance and branch inductance in RF matching network and derives the impedance formula of RF ion source.