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空心热阴极离子镀是七十年代发展起来的物理气相沉积技术。目前国内外正在对这种技术的工艺、涂层形成机理和应用进行深入研究。本文主要研究钛蒸发速率的影响因素、氮分压对涂层相结构的影响,以及基板温度对涂层组织形态的影响。
Hollow hot cathode plating is developed in the seventies of physical vapor deposition technology. Currently at home and abroad are the technology of this technology, coating formation mechanism and application of in-depth study. In this paper, the factors that affect the evaporation rate of titanium, the effect of nitrogen partial pressure on the phase structure of the coating, and the influence of substrate temperature on the morphology of the coating were studied.