【摘 要】
：
The effects of dry O2post oxidation annealing(POA)at different temperatures on SiC/SiO2stacks are comparatively studied in this paper.The results show interface trap density(Dit)of SiC/SiO2stacks,leakage current density(Jg
【机 构】
：
KeyLaboratoryofMicroelectronicsDevices&IntegratedTechnology,UniversityofChineseAcademyofSciences
【基金项目】
：
the General Program of the National Natural Science Foundation of China(Grant No.61974159),the Youth Innovation Promotion Association of the Chinese Academy of Sciences and Scientific Instrument Devel
论文部分内容阅读
The effects of dry O2post oxidation annealing(POA)at different temperatures on SiC/SiO2stacks are comparatively studied in this paper.The results show interface trap density(Dit)of SiC/SiO2stacks,leakage current density(Jg
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