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提出了一种多层１／４波长膜系的薄膜厚度监控方法．利用这种方法可以在监控过程的同时得到膜层的光学常数且具有监控精度高的优点．该方法也可用于非１／４波长膜系的控制
A multi-layer 1/4 wavelength film thickness monitoring method is proposed. With this method, the optical constants of the film can be obtained while monitoring the process, and the monitoring accuracy is high. This method can also be used for the control of non-quarter-wave film systems