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采用自制实时取样系统及四极质谱仪测量TEACO2激光器放电过程中气体组分变化,分析了测量结果对TEACO2激光器放电状态的影响.
The self-made real-time sampling system and quadrupole mass spectrometer were used to measure the gas composition changes during the TEACO2 laser discharge. The influence of the measurement results on the TEACO2 laser discharge state was analyzed.